Friction and wear in surface-micromachined tribological test devices

Donna Cowell Senft; Michael T. Dugger

doi:10.1117/12.284533

5 September 1997 Friction and wear in surface-micromachined tribological test devices

Donna Cowell Senft, Michael T. Dugger

Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284533
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

We report on the design, construction, and initial testing of surface micromachined devices for the measurement of friction and wear. The devices measure friction coefficients on both horizontal deposited polysilicon surfaces and vertical etched polysilicon surfaces. The contact geometry of the rubbing surfaces is well-defined, and a method is presented for the determination of the normal and frictional forces. Initial observations on test devices which have been dried with supercritical CO₂ and devices coated with octadecyltrichlorosilane suggest that the coatings increase the lifetime of the devices and the repeatability of the results.

Citation Download Citation

Donna Cowell Senft and Michael T. Dugger "Friction and wear in surface-micromachined tribological test devices", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); https://doi.org/10.1117/12.284533

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