Paper
5 September 1997 Microfluidic plastic interconnects for multibioanalysis chip modules
Piu Francis Man, Darren K. Jones, Carlos H. Mastrangelo
Author Affiliations +
Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284516
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States
Abstract
This paper describes the fabrication and testing of plastic fluidic connectors suitable for the assembly of multichip microfluidic systems. The connectors basically consist of a series of 50-200 X 20 micrometers 2 capillaries embedded in a 70 micrometers -thick flexible polyimide substrate with large access holes ion both ends. The capillary walls and the connector exterior are coated with a thin layer of p- xylylene providing a high degree of chemical inertness and biocompatibility. These flexible connectors are inherently planar for ease of connection to flat substrates and are constructed using conventional batch lithographic techniques. The connector flow characteristics were tested in nitrogen gas and water. Multiple channel connectors with 3 and 5 capillaries 1.3-4.0 cm-long were constructed successfully.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Piu Francis Man, Darren K. Jones, and Carlos H. Mastrangelo "Microfluidic plastic interconnects for multibioanalysis chip modules", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); https://doi.org/10.1117/12.284516
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Cited by 12 scholarly publications.
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KEYWORDS
Connectors

Microfluidics

Capillaries

Ions

Lithography

Nitrogen

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