Electrostatically actuated stylus profiler with capacitive displacement sensing in vertical and lateral directions

Mike D. Kearny; Burford J. Furman

doi:10.1117/12.304408

1 April 1998 Electrostatically actuated stylus profiler with capacitive displacement sensing in vertical and lateral directions

Mike D. Kearny, Burford J. Furman

Author Affiliations +

Proceedings Volume 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II; (1998) https://doi.org/10.1117/12.304408
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

A new profiler is under development that uses a commercially available electrostatic device normally used for nanoindentation as its primary sensing element. The new profiler can measure the force applied to the sample and the displacement of the stylus tip in both the vertical (Z) and lateral (X) directions, while the tip is moved in the forward (Y) direction. The sensor has a range of 100 microns and a resolution of 0.2 nm in the Z and X directions. The sensor can measure the force between the tip and the sample with a resolution of 100 nN up to 10 mN. The sensor is normally used to measure indentation force and distance simultaneously during nanoindenting. The instrument allows the force between the stylus tip and the sample to be controlled to a predetermined level and records the displacement of the tip as it scans the sample. Windows based software allows the data to be analyzed for roughness and waviness. The sensor can also move the tip in a lateral (X) direction by applying an electrostatic force to the tip. Lateral motion allows scans to be taken parallel to one another within a 100 micron range. The instrument can be operated in this manner to produce a limited 3D scan of the surface. This instrument offers a low cost device capable of high-resolution profilometry and limited 3D scanning.

Citation Download Citation

Mike D. Kearny and Burford J. Furman "Electrostatically actuated stylus profiler with capacitive displacement sensing in vertical and lateral directions", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); https://doi.org/10.1117/12.304408

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Transducers

Sensors

Motion controllers

Control systems

Data acquisition

Human-machine interfaces

3D metrology

Show All Keywords

Keywords/Phrases

Search In:

Publication Years