Generation of microstructures in silicon for MEMS applications

Amita Gupta; Mahnder. Pal; P. P. Puri; Ranvir Singh; D. S. Ahuja

doi:10.1117/12.305550

16 April 1998 Generation of microstructures in silicon for MEMS applications

Amita Gupta, Mahnder. Pal, P. P. Puri, Ranvir Singh, D. S. Ahuja

Proceedings Volume 3321, 1996 Symposium on Smart Materials, Structures, and MEMS; (1998) https://doi.org/10.1117/12.305550
Event: Smart Materials, Structures and MEMS, 1996, Bangalore, India

Abstract

Excellent mechanical properties of silicon together with the advantage of fabrication of the IC circuitary on the same chip make it a very viable material for sensors. Thin membranes and diaphragms generated in crystalline silicon form an integral part of many micromechanical systems. In this paper, comparison of various techniques for bulk micromachining of silicon to create new structures is discussed. A new technique based on porous silicon formation using selective anodization is presented which is useful for generating different patterns required for making sensor arrays.

Citation Download Citation

Amita Gupta, Mahnder. Pal, P. P. Puri, Ranvir Singh, and D. S. Ahuja "Generation of microstructures in silicon for MEMS applications", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); https://doi.org/10.1117/12.305550

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