Control of a drop ejector used as a photoresist dispenser

Philippe E. Roche; Anders Hansson; Butrus T. Khuri-Yakub

doi:10.1117/12.316324

24 July 1998 Control of a drop ejector used as a photoresist dispenser

Philippe E. Roche, Anders Hansson, Butrus T. Khuri-Yakub

Proceedings Volume 3323, Smart Structures and Materials 1998: Mathematics and Control in Smart Structures; (1998) https://doi.org/10.1117/12.316324
Event: 5th Annual International Symposium on Smart Structures and Materials, 1998, San Diego, CA, United States

Abstract

Photo-resist dispensers traditionally apply a generous amount of resist on the wafer and then spin the wafer to reach a uniform desired thickness. With this technique, over 95% of expensive and hazardous liquid is wasted. The goal of this project is to reduce the waste by using a drop-on- demand ejection technology to apply the photo-resist. In practice, a controller turns out to be necessary to compensate for the variability of the performance of the ejectors, to insure the stability of the ejection, and to speed up the transient regime for drop-on-demand operation. The paper reports on the design and simulation of this controller.

Citation Download Citation

Philippe E. Roche, Anders Hansson, and Butrus T. Khuri-Yakub "Control of a drop ejector used as a photoresist dispenser", Proc. SPIE 3323, Smart Structures and Materials 1998: Mathematics and Control in Smart Structures, (24 July 1998); https://doi.org/10.1117/12.316324

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