Test results of a resonant integrated microbeam sensor (RIMS) for acoustic emission monitoring

Jeffrey N. Schoess; J. David Zook

doi:10.1117/12.320185

20 July 1998 Test results of a resonant integrated microbeam sensor (RIMS) for acoustic emission monitoring

Jeffrey N. Schoess, J. David Zook

Proceedings Volume 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS; (1998) https://doi.org/10.1117/12.320185
Event: 5th Annual International Symposium on Smart Structures and Materials, 1998, San Diego, CA, United States

Abstract

An acoustic emission (AE) sensor has been developed by Honeywell Technology Center for avionics, industrial control, and military applications. The AE sensor design is based on an integrated silicon microstructure, a resonant microbeam with micron-level feature size, and frequency sensitivity up to 500 kHz. The AE sensor has been demonstrated successfully in the laboratory test environment to sense and characterize a simulated AE even for structural fatigue crack monitoring applications. The technical design approach and laboratory test results are presented.

Citation Download Citation

Jeffrey N. Schoess and J. David Zook "Test results of a resonant integrated microbeam sensor (RIMS) for acoustic emission monitoring", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); https://doi.org/10.1117/12.320185

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