Self-aligned ormosil waveguide devices

Kewen K. Li; Edward J. Salley; Paul Melman; Marvin J. Tabasky; Jing Zhao; Chia-Yen Li

doi:10.1117/12.312920

6 July 1998 Self-aligned ormosil waveguide devices

Kewen K. Li, Edward J. Salley, Paul Melman, Marvin J. Tabasky, Jing Zhao, Chia-Yen Li

Proceedings Volume 3469, Organic-Inorganic Hybrid Materials for Photonics; (1998) https://doi.org/10.1117/12.312920
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

This paper describes a method to passively align optical fibers with on-chip ormosil waveguide devices. One objective is to demonstrate that photosensitive sol-gel (ormosil) materials can be applied to fabricate a family of low-cost, high-quality, self-aligned microchip couplers. Feasibility of forming sol-gel waveguide couplers on silicon chips with on- chip V-grooves for passive alignment of ribbon fibers is studied. The optical waveguide material is deposited onto silicon wafers on which high precision alignment grooves are fabricated to support the input or output optical fibers. By forming V-grooves and wave-guides on the same substrate with precise dimensional control, passive optical alignment can be achieved. This passive alignment scheme can result in a large cost reduction for integrated optics' devices. Several cost- and labor-intensive manufacturing processes would be either eliminated or simplified. This scheme can be used for both single- and multi-mode applications. The method is particularly useful for interconnecting on-chip waveguiding devices with optical fiber ribbons, in which multi-fiber alignment is difficult by conventional active methods.

Citation Download Citation

Kewen K. Li, Edward J. Salley, Paul Melman, Marvin J. Tabasky, Jing Zhao, and Chia-Yen Li "Self-aligned ormosil waveguide devices", Proc. SPIE 3469, Organic-Inorganic Hybrid Materials for Photonics, (6 July 1998); https://doi.org/10.1117/12.312920

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available