Novel approaches in polarized optical reflectometry

Gregory I. Surdutovich; R. Z. Vitlina; Alexandre V. Ghiner; Vitor Baranauskas

doi:10.1117/12.328251

21 October 1998 Novel approaches in polarized optical reflectometry

Gregory I. Surdutovich, R. Z. Vitlina, Alexandre V. Ghiner, Vitor Baranauskas

Proceedings Volume 3485, 11th International Vavilov Conference on Nonlinear Optics; (1998) https://doi.org/10.1117/12.328251
Event: Eleventh International Vavilov Conference on Nonlinear Optics, 1997, Novosibirsk, Russian Federation

Abstract

Due to its simplicity polarization reflectometry technique have some advantages over the ellipsometric methods. We demonstrate this claim in the threefold manner suggesting three novel polarization reflectometry methods for the determination of an optical anisotropy. The first method is based on the measurement of s- and p- polarized light reflectances under near normal or grazing angles (or both) and of the Brewster angle. It may be applied to any uniaxially anisotropic medium. The second method is based on the use of the Azzam Universal Relationship (AUR) between the Fresnel s- and p- reflection coefficients. For a flat surface and an isotropic medium, the Azzam combination of coefficients becomes zero and thus independent of the incidence angle. Finally, for those cases in which the anisotropy of the material of a film deposited on an isotropic substrate is itself of interest a third Interference Method (IM) is suggested. This technique makes use of the different dependences of s- and p- polarized beam optical pathlength changes on the variation of the angle of incidence.

Citation Download Citation

Gregory I. Surdutovich, R. Z. Vitlina, Alexandre V. Ghiner, and Vitor Baranauskas "Novel approaches in polarized optical reflectometry", Proc. SPIE 3485, 11th International Vavilov Conference on Nonlinear Optics, (21 October 1998); https://doi.org/10.1117/12.328251

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