Flexible microgrippers fabricated on photosensitive glass for micromanipulation

Riad Salim; Helmut Wurmus

doi:10.1117/12.325728

5 October 1998 Flexible microgrippers fabricated on photosensitive glass for micromanipulation

Riad Salim, Helmut Wurmus

Author Affiliations +

Proceedings Volume 3519, Microrobotics and Micromanipulation; (1998) https://doi.org/10.1117/12.325728
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

In this paper a new development for microgripping will be presented. The main specific features are the on microfabrication based manufacturing, the multi gear ratio motion transmission and the one piece design of the gripper structure. The fabrication of microgripper is based on a UV- lithographic process in microstructurable, photosensitive glass. The most important feature of this new approach is the nonlinear behavior of the motion translation. Compliant mechanisms consisting of hinges with exactly calculated stiffnesses were microfabricated using the microstructuring technologies of the Microsystems. By using the integrated mechanical stop the microgripper is able to change the gearing ratio during the movement. In this way it is possible to get more gripper flexibility compared with just linear transmission (gearing). The combination of the microfabrication, backlash-free and nonlinear motion transmission make the new gripper an innovative approach for the field of microassembly. The new developed grippers were fabricated and tested successfully.

Citation Download Citation

Riad Salim and Helmut Wurmus "Flexible microgrippers fabricated on photosensitive glass for micromanipulation", Proc. SPIE 3519, Microrobotics and Micromanipulation, (5 October 1998); https://doi.org/10.1117/12.325728

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