Excimer-laser-beam homogenization for materials processing

Lars Unnebrink; Thomas F. E. Henning; Ernst-Wolfgang Kreutz; Reinhart Poprawe

doi:10.1117/12.320992

19 August 1998 Excimer-laser-beam homogenization for materials processing

Lars Unnebrink, Thomas F. E. Henning, Ernst-Wolfgang Kreutz, Reinhart Poprawe

Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.320992
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary

Abstract

The paper presents an analysis of non-imaging integrators, which can be used for laser beam homogenization for materials processing with excimer laser radiation. A model for the transversal degree of coherence of the laser radiation is presented in order to estimate the performance of the integrating devices for the partially coherent excimer laser radiation. This is necessary for a more relevant design of those elements than a design by geometric optical means only.

Citation Download Citation

Lars Unnebrink, Thomas F. E. Henning, Ernst-Wolfgang Kreutz, and Reinhart Poprawe "Excimer-laser-beam homogenization for materials processing", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.320992

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