Polysilicon surface micromachined optical rotating sensor

Ludi Zheng; Anand Krishna Asundi; Ai Qun Liu; Franck Alexis Chollet

doi:10.1117/12.354270

20 July 1999 Polysilicon surface micromachined optical rotating sensor

Ludi Zheng, Anand Krishna Asundi, Ai Qun Liu, Franck Alexis Chollet

Author Affiliations +

Proceedings Volume 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS; (1999) https://doi.org/10.1117/12.354270
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

This paper presents a new design of micromachined optical rotating sensor (ORS). The concept demonstration prototype shows that the sensor will be low cost, small and reliable. To obtain a micro ORS, a ring resonator was designed, based on the three-layer polysilicon surface micromachining process. The ring resonator is made up of three micro mirrors and a laser diode coated with an anti-reflective coating. The micro ORS relies on the Sagnac effect for its operation. The resolution analysis and sensor design is presented here, and the signal processing and control system design is discussed. The theoretical resolution is in the range of 1 - 6 deg/h.

Citation Download Citation

Ludi Zheng, Anand Krishna Asundi, Ai Qun Liu, and Franck Alexis Chollet "Polysilicon surface micromachined optical rotating sensor", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354270

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