Model study by FT-IR of the interaction of select cholate dissolution inhibitors with poly(norbornene-alt-maleic anhydride) and its derivatives

Gary Dabbagh; Francis M. Houlihan; Ilya Rushkin; Richard S. Hutton; Omkaram Nalamasu; Elsa Reichmanis; Allen H. Gabor; Arturo N. Medina

doi:10.1117/12.350155

11 June 1999 Model study by FT-IR of the interaction of select cholate dissolution inhibitors with poly(norbornene-alt-maleic anhydride) and its derivatives

Gary Dabbagh, Francis M. Houlihan, Ilya Rushkin, Richard S. Hutton, Omkaram Nalamasu, Elsa Reichmanis, Allen H. Gabor, Arturo N. Medina

Author Affiliations +

Proceedings Volume 3678, Advances in Resist Technology and Processing XVI; (1999) https://doi.org/10.1117/12.350155
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

The fundamental nature of the interaction between the polymer matrix and the cholate based dissolution inhibitors are being studied by Fourier Transform-IR (FTIR) spectroscopy. It was found that the simple cholate derivatives undergo, in a blend with poly(norbornene-alt- maleic anhydride) and in a blend with the terpolymers poly(norbornene-alt-maleic anhydride-co-t-butylacrylate) and poly(norbornene-alt-maleic anhydride-co-acrylic acid), stronger interaction as seen by shifts in the OH region of the spectra than do blends with dimeric or oligomeric cholates.

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Gary Dabbagh, Francis M. Houlihan, Ilya Rushkin, Richard S. Hutton, Omkaram Nalamasu, Elsa Reichmanis, Allen H. Gabor, and Arturo N. Medina "Model study by FT-IR of the interaction of select cholate dissolution inhibitors with poly(norbornene-alt-maleic anhydride) and its derivatives", Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); https://doi.org/10.1117/12.350155

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