Paper
10 March 1999 Evaporating two-phase flow mechanism in microchannels
Yoav P. Peles, Leonid P. Yarin, Gad Hetsroni
Author Affiliations +
Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341206
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
The basic evaporating two-phase flow mechanism in micro- channels is introduced. This flow is accompanied by a very high heat transfer coefficient and can remove very high heat fluxes at low temperatures, thus, making it attractive for micro device cooling applications. An experimental micro- channels chip was fabricate by means of a photolithography process, in order to study the flow mechanism involved in such flow. The results show that there is periodic behavior in evaporating two-phase flow in micro-channels, with a few harmonics.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoav P. Peles, Leonid P. Yarin, and Gad Hetsroni "Evaporating two-phase flow mechanism in microchannels", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341206
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Cited by 5 scholarly publications.
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KEYWORDS
Liquids

Heat flux

Resistors

Silicon

Capillaries

Optical lithography

Manufacturing

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