Wavelength scanning confocal interference microscope for separate measurement of refractive index and geometrical thickness

Takashi Fukano; Ichirou Yamaguchi

doi:10.1117/12.347819

7 May 1999 Wavelength scanning confocal interference microscope for separate measurement of refractive index and geometrical thickness

Takashi Fukano, Ichirou Yamaguchi

Author Affiliations +

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347819
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

We previously proposed a system based on a combination of a confocal microscope and a wavelength scanning heterodyne interferometer, for separate measurement of refractive index and geometrical thickness of lens and plates. However, we used two optical systems successively although they share the same optical system. In this paper, we propose a new measurement scheme which enable us to measure both the confocal profile and the optical path difference of the interferometer by single scanning of an object. We describe herE the measurement principle, the apparatus, signal processing means, and some experimental results.

Citation Download Citation

Takashi Fukano and Ichirou Yamaguchi "Wavelength scanning confocal interference microscope for separate measurement of refractive index and geometrical thickness", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347819

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available