White light phase-shifting interferometry with self-compensation of PZT scanning errors

Seung-Woo Kim; MinGu Kang; SangYoon Lee

doi:10.1117/12.347782

7 May 1999 White light phase-shifting interferometry with self-compensation of PZT scanning errors

Seung-Woo Kim, MinGu Kang, SangYoon Lee

Author Affiliations +

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347782
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

One of main error sources in scanning white light interferometry is the inaccuracy of scanning mechanisms for which PZT piezoelectric ceramics actuators are widely used. In this paper, we propose a new calibration method being capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. Experimental results prove that the method provides an effective means of in-situ self-calibration enhancing the measurement uncertainty by one order of magnitude.

Citation Download Citation

Seung-Woo Kim, MinGu Kang, and SangYoon Lee "White light phase-shifting interferometry with self-compensation of PZT scanning errors", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347782

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE