Fringe analysis in phase-shifting interferometers suppressing spatially nonuniform phase modulation, beam amplitude modulation, and nonlinearity of modulator

Kenichi Hibino

doi:10.1117/12.357721

13 August 1999 Fringe analysis in phase-shifting interferometers suppressing spatially nonuniform phase modulation, beam amplitude modulation, and nonlinearity of modulator

Kenichi Hibino

Author Affiliations +

Proceedings Volume 3744, Interferometry '99: Techniques and Technologies; (1999) https://doi.org/10.1117/12.357721
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland

Abstract

In a phase-shifting interferometer, spatial non-uniformity of the phase modulation happens in such a case where an aspherical mirror is compared to the corresponding aspherical standard surface which is translated along the optical axis by a piezo electric transducer. The amount of phase shift is different from position to position across the observing aperture depending on the direction cosine of the testing surface. In another case, when the reference optical flat is translated by two or more piezo-electric transducers, we cannot ensure that the reference surface moves strictly parallel to the optical axis. When these transducers have different sensitivities, the phase modulation is not longer spatially uniform and varies across the observing aperture.

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Kenichi Hibino "Fringe analysis in phase-shifting interferometers suppressing spatially nonuniform phase modulation, beam amplitude modulation, and nonlinearity of modulator", Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); https://doi.org/10.1117/12.357721

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