Characterization of wavefront variations in coated optics

Bozenko F. Oreb; Roger Pryce Netterfield; Christopher J. Walsh; Christopher H. Freund; Achim J. Leistner; Jeffrey A. Seckold

doi:10.1117/12.369189

11 November 1999 Characterization of wavefront variations in coated optics

Bozenko F. Oreb, Roger Pryce Netterfield, Christopher J. Walsh, Christopher H. Freund, Achim J. Leistner, Jeffrey A. Seckold

Author Affiliations +

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369189
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

The wavefronts reflected by and transmitted through a coated substrate will be influenced by the non-uniformities of the coatings and distortion of the substrate produced as a result of coating stress. In this paper we describe the characterization procedure and results of a coated substrate for the Laser Interferometer Gravitational wave Observatory (LIGO) project. The fused silica substrate is 250 mm in diameter, 40 mm thick and on one side a multilayer anti- reflection coating is deposited and a 50% reflectivity multilayer coating on the other. To characterize the coatings, reflected and transmitted wavefront measurements were carried out with a 300 mm aperture phase-shifting Fizeau interferometer in combination with ellipsometric measurements of the coated surfaces. The interferometric measurements allowed the deformation of the substrate by the coatings to be assessed while the ellipsometric measurements allowed the coatings' thickness variation to be measured and the resulting phase variation in the reflected and transmitted wavefronts to be estimated. The measurements revealed substrate deformation of about 45 nm with a coating relief non-uniformity of about 5 nm over a working aperture of 200 mm.

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Bozenko F. Oreb, Roger Pryce Netterfield, Christopher J. Walsh, Christopher H. Freund, Achim J. Leistner, and Jeffrey A. Seckold "Characterization of wavefront variations in coated optics", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369189

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