Three-dimensional surface profilometry using structured liquid crystal grating

Ken Yamatani; Hiroo Fujita; Masayuki Yamamoto; Akira Suguro; Yukitoshi Otani; Shigeru Morokawa; Toru Yoshizawa

doi:10.1117/12.369195

11 November 1999 Three-dimensional surface profilometry using structured liquid crystal grating

Ken Yamatani, Hiroo Fujita, Masayuki Yamamoto, Akira Suguro, Yukitoshi Otani, Shigeru Morokawa, Toru Yoshizawa

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369195
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

This paper describes a device for measuring the three dimensional surface profile using a grating projection method. A phase shifting technique without any mechanical moving is expected for profile analysis. A grating that is a key component in this technique is made using an active controlled liquid crystal (LC). This LC grating has the performances of more than 8 bits of gray levels and its grating period is 50 micro-meters per line without any colored filters. Surface profiles of some samples are measured for the demonstration of the system.

Citation Download Citation

Ken Yamatani, Hiroo Fujita, Masayuki Yamamoto, Akira Suguro, Yukitoshi Otani, Shigeru Morokawa, and Toru Yoshizawa "Three-dimensional surface profilometry using structured liquid crystal grating", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369195

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