Microassembly and microbonding in Nano Manufacturing World

Kensuke Tsuchiya; Akihiro Murakami; Gustavo Fortmann; Masayuki Nakao; Yotaro Hatamura

doi:10.1117/12.357817

18 August 1999 Microassembly and microbonding in Nano Manufacturing World

Kensuke Tsuchiya, Akihiro Murakami, Gustavo Fortmann, Masayuki Nakao, Yotaro Hatamura

Proceedings Volume 3834, Microrobotics and Microassembly; (1999) https://doi.org/10.1117/12.357817
Event: Photonics East '99, 1999, Boston, MA, United States

Abstract

The authors are developing a table top factory, which is called ` Nano Manufacturing World (NMW)', in order to make 3D micro structures for information devices or medical tools. In this paper, we demonstrate a pick-and-place task of micro objects using an electric charged tool under SEM observation, and bonding task of them using a pencil-type semiconductor laser in vacuum. In NMW, we installed the electric changed tool in its right hand, the semiconductor laser in its left hand, and micro objects on its table. As if we were in a nano-scale world, we can operate the micro tasks.

Citation Download Citation

Kensuke Tsuchiya, Akihiro Murakami, Gustavo Fortmann, Masayuki Nakao, and Yotaro Hatamura "Microassembly and microbonding in Nano Manufacturing World", Proc. SPIE 3834, Microrobotics and Microassembly, (18 August 1999); https://doi.org/10.1117/12.357817

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