Surface-micromachined electrostatic diaphragm micropump

Won-Ick Jang; Yong Il Lee; Chang-Auck Choi; Chi-Hoon Jun; Youn Tae Kim

doi:10.1117/12.364469

29 September 1999 Surface-micromachined electrostatic diaphragm micropump

Won-Ick Jang, Yong Il Lee, Chang-Auck Choi, Chi-Hoon Jun, Youn Tae Kim

Proceedings Volume 3891, Electronics and Structures for MEMS; (1999) https://doi.org/10.1117/12.364469
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

An electrostatic diaphragm micropump for fluids and gases has been designed and fabricated by silicon surface micromachining. Diaphragm structures are bridge-type, cantilever-type and fan-type polysilicon, and sacrificial layers are low-temperatures oxide on polysilicon substrates. The developed anhydrous HF gas-phase etching of sacrificial oxide on polysilicon substrates has been employed to release polysilicon microstructures. The fabricated micropump with size of the order of 1 mm² operates at square wave voltage of 10V and 2Hz under near room temperature and normal atmospheric pressure.

Citation Download Citation

Won-Ick Jang, Yong Il Lee, Chang-Auck Choi, Chi-Hoon Jun, and Youn Tae Kim "Surface-micromachined electrostatic diaphragm micropump", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); https://doi.org/10.1117/12.364469

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