Lens temperature and performance correlation analysis

Jian-Yuan Chiou; M. F. Chen; C. L. Liu; Chih-Chien Hung

doi:10.1117/12.364506

1 October 1999 Lens temperature and performance correlation analysis

Jian-Yuan Chiou, M. F. Chen, C. L. Liu, Chih-Chien Hung

Author Affiliations +

Proceedings Volume 3892, Device and Process Technologies for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.364506
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

Lens temperature is a dominant factor for lens performance in steppers. The lens temperature of steppers was controlled tightly with TCU system. This paper aims to discuss lens UDOF, NCE, Astigmatism, FPD, IPT, lens heating performance and CD repeatability. From experiment result, the optimized lens temperature is 22 degrees C of '74' lens. It resulted in maximum UDOF, minimum Astigmatism, minimum FPD, minimum NCE and minimum IPT. And under this temperature, there is minimum Intra-field CED STD and range on the conditions of lens cooling and heating. Non-optimized lens temperature will result in UDOF decrease and Aerial image distortion.

Citation Download Citation

Jian-Yuan Chiou, M. F. Chen, C. L. Liu, and Chih-Chien Hung "Lens temperature and performance correlation analysis", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); https://doi.org/10.1117/12.364506

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE