Simulation and study on the temperature effect of the a-Ta2O5 ISFET

Jung Chuan Chou; Ying Shin Li

doi:10.1117/12.369378

11 November 1999 Simulation and study on the temperature effect of the a-Ta2O5 ISFET

Jung Chuan Chou, Ying Shin Li

Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369378
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

In the research, we simulated the temperature characteristics of the a-Ta₂O₅ ISFET by the Gouy- Chapman-Stern theory. The values of the pK_a and pK_b would be induced to calculate the temperature coefficients of the a-Ta₂O₅ ISFETs for predicting the behaviors of the a-Ta₂O₅ ISFET under different temperatures. In the experiment we used the method finding the V_GS values of the experimental curves by fixed I_DS value to get the pH sensitivities at different temperatures. By using the same way we could change the temperatures to find the temperature coefficients in different pH solutions. The relationship of the pH sensitivities of a-Ta₂O₅ ISFET versus the temperatures were the linear. Oppositely the curves of the temperature coefficients is not linearly obviously.

Citation Download Citation

Jung Chuan Chou and Ying Shin Li "Simulation and study on the temperature effect of the a-Ta2O5 ISFET", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); https://doi.org/10.1117/12.369378

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available