Modeling of the optical torsion micromirror

Xuming Zhang; Fook Siong Chau; Chenggen Quan; Ai Qun Liu

doi:10.1117/12.369382

9 November 1999 Modeling of the optical torsion micromirror

Xuming Zhang, Fook Siong Chau, Chenggen Quan, Ai Qun Liu

Author Affiliations +

Proceedings Volume 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures; (1999) https://doi.org/10.1117/12.369382
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

Torsion micromirror devices have been widely used in many applications. This paper describes the modeling of a torsion beam micromirror based on the parallel plate capacitor model. First, a generalized and normalized equation that governs the static characteristics of the torsion micromirror device is derived. Henceforth the influence of the structural parameters of micromirror is discussed, and the snap-down effect and the capacitance variation of the micromirror are studied. Finally, a micromirror is designed and fabricated. However, the model has not yet been verified by experimental data as testing is in progress.

Citation Download Citation

Xuming Zhang, Fook Siong Chau, Chenggen Quan, and Ai Qun Liu "Modeling of the optical torsion micromirror", Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); https://doi.org/10.1117/12.369382

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