Photonic all-silicon microsensor for electromagnetic power in the microwave and millimeter-wave range

Ivo Rendina; Marco Bellucci; Giuseppe Cocorullo; Francesco G. Della Corte; Mario Iodice

doi:10.1117/12.379947

24 March 2000 Photonic all-silicon microsensor for electromagnetic power in the microwave and millimeter-wave range

Ivo Rendina, Marco Bellucci, Giuseppe Cocorullo, Francesco G. Della Corte, Mario Iodice

Author Affiliations +

Proceedings Volume 3936, Integrated Optics Devices IV; (2000) https://doi.org/10.1117/12.379947
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

A new type of non-perturbing electromagnetic power sensor for microwaves and millimeter-waves, based on the thermo- optical effect in a silicon interferometric etalon cavity is presented. The incident field power is partially dissipated into the all-silicon metal-less etalon, constituting the sensing element of the detector, so causing its temperature increase. This, in turn, induces the intensity modulation of a probe laser beam reflected by the cavity after a multiple beam interference process. The sensing element is directly connected to an optical fiber for remote interrogation, so avoiding the use of perturbing coaxial cables. The performances of such a new class of non-perturbing and wideband probes, in terms of sensitivity and resolution are discussed in detail. The experimental results concerning the characterization of a preliminary prototype sensor are presented and compared with theoretical data. The dependence of the sensor response on the electromagnetic frequency and on the sensing element characteristics is finally discussed.

Citation Download Citation

Ivo Rendina, Marco Bellucci, Giuseppe Cocorullo, Francesco G. Della Corte, and Mario Iodice "Photonic all-silicon microsensor for electromagnetic power in the microwave and millimeter-wave range", Proc. SPIE 3936, Integrated Optics Devices IV, (24 March 2000); https://doi.org/10.1117/12.379947

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