MEMS sensing and control: an aerospace perspective

Jeffrey N. Schoess; David K. Arch; Wei Yang; Cleopatra Cabuz; Ben Hocker; Burgess R. Johnson; Mark L. Wilson

doi:10.1117/12.388895

21 June 2000 MEMS sensing and control: an aerospace perspective

Jeffrey N. Schoess, David K. Arch, Wei Yang, Cleopatra Cabuz, Ben Hocker, Burgess R. Johnson, Mark L. Wilson

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388895
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

Future advanced fixed- and rotary-wing aircraft, launch vehicles, and spacecraft will incorporate smart microsensors to monitor flight integrity and provide flight control inputs. This paper provides an overview of Honeywell's MEMS technologies for aerospace applications of sensing and control. A unique second-generation polysilicon resonant microbeam sensor design is described. It incorporates a micron-level vacuum-encapsulated microbeam to optically sense aerodynamic parameters and to optically excite the sensor pick off: optically excited self-resonant microbeams form the basis for a new class of versatile, high- performance, low-cost MEMS sensors that uniquely combine silicon microfabrication technology with optoelectronic technology that can sense dynamic pressure, acceleration forces, acoustic emission, and many other aerospace parameters of interest. Honeywell's recent work in MEMS tuning fork gyros for inertial sensing and a MEMS free- piston engine are also described.

Citation Download Citation

Jeffrey N. Schoess, David K. Arch, Wei Yang, Cleopatra Cabuz, Ben Hocker, Burgess R. Johnson, and Mark L. Wilson "MEMS sensing and control: an aerospace perspective", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388895

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