Laser-deposited active layers of chemical sensors

Filip Vyslouzil; Martin Vrnata; Vladimir Myslik; Miroslav Jelinek

doi:10.1117/12.373646

29 December 1999 Laser-deposited active layers of chemical sensors

Filip Vyslouzil, Martin Vrnata, Vladimir Myslik, Miroslav Jelinek

Proceedings Volume 4016, Photonics, Devices, and Systems; (1999) https://doi.org/10.1117/12.373646
Event: Photonics Prague '99, 1999, Prague, Czech Republic

Abstract

Thin active layers of chemical sensor were deposited form tin dioxide targets by the pulsed laser deposition (PLD) method. The deposition was made by employing excimer KrF laser. The bearing part of the senor is an alumina chip provided by Pt-electrodes in the interdigital configuration. They serve for reading of the sensor response - DC resistance of active layer. Under reducing gases the resistance of the active layer decreases. For the stabilization of sensor properties it is necessary to use dopants. In this case the PLD technology enables an original solution-introduction of dopants as a multilayered structure. In order to improve the sensor parameters, catalytic Pt or Pd is vaporized to the surface of active layer in the form of non-aggregated particles.

Citation Download Citation

Filip Vyslouzil, Martin Vrnata, Vladimir Myslik, and Miroslav Jelinek "Laser-deposited active layers of chemical sensors", Proc. SPIE 4016, Photonics, Devices, and Systems, (29 December 1999); https://doi.org/10.1117/12.373646

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