Functional material processing using intense femtosecond, nanosecond, and microsecond laser ablation

Minoru Obara; Hiroyuki Yabe; Yoichi Hirayama; Kousuke Takahashi; Kentaro Furusawa; Fabien Barnier; Yong Pyung Kim

doi:10.1117/12.407349

16 August 2000 Functional material processing using intense femtosecond, nanosecond, and microsecond laser ablation

Minoru Obara, Hiroyuki Yabe, Yoichi Hirayama, Kousuke Takahashi, Kentaro Furusawa, Fabien Barnier, Yong Pyung Kim

Proceedings Volume 4065, High-Power Laser Ablation III; (2000) https://doi.org/10.1117/12.407349
Event: High-Power Laser Ablation, 2000, Santa Fe, NM, United States

Abstract

The new material processing characteristic of aluminum nitride (AlN) ceramic is compared with microsecond, nanosecond and femtosecond laser ablation. The conventional laser material processing technology with longer pulsewidth laser such as TEA CO₂ laser, Q-switched YAG laser, and excimer lasers leads to the thermal shock or lateral damage on target material, and those thermal effect causes the surface modification of AlN ceramic target. The comparative study of the laser ablation with microsecond TEA CO₂ laser pulse, nanosecond KrF excimer laser pulse, and femtosecond Ti:sapphire laser pulse is performed in time domain. Using intense ultrashort titanium sapphire laser two-photon laser ablation of TiO₂ photo-catalyst was also investigated experimentally and theoretically aiming at the enhancement of photo-catalyst reaction. The black-surfacing of the TiO₂ photo- catalyst crystal was successfully achieved by drilling a large number of conical micro-holes with two-photon laser ablation. The ablated surface has a roughness of sub micrometer order, and no heat-affected zone was observed. The simple equation is developed to explain two-photon ablation process of the TiO₂ photo- catalyst and the dependence of the ablation characteristic on the pulsewidth.

Citation Download Citation

Minoru Obara, Hiroyuki Yabe, Yoichi Hirayama, Kousuke Takahashi, Kentaro Furusawa, Fabien Barnier, and Yong Pyung Kim "Functional material processing using intense femtosecond, nanosecond, and microsecond laser ablation", Proc. SPIE 4065, High-Power Laser Ablation III, (16 August 2000); https://doi.org/10.1117/12.407349

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