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The fabrication processes of the photoelement using Si planar technology and the ion implantation method are described in this paper. The phototriodes with high amplification coefficient are produced by controlling the time and the temperature of diffusion. Some samples are tested with JT-1 type transistor characteristic graphic instrument and the photoelectric spectrophotometer. It is found that the breakdown voltage and the amplification coefficient are very good, and the response to homogeneous light, especially to the light of 515 nm, is consonant with the demands.
Hetai Li,Haiqing Dong, andZhiwu Cui
"Photoelements of blue-purple", Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); https://doi.org/10.1117/12.385526
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Hetai Li, Haiqing Dong, Zhiwu Cui, "Photoelements of blue-purple," Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); https://doi.org/10.1117/12.385526