Thickness and refractivity computation in ellipsometry measurement by genetic algorithm

Zilong Peng; Zuoyi Li; Yu Hu; Liguo Tang; Xiaofei Yang

doi:10.1117/12.385519

9 May 2000 Thickness and refractivity computation in ellipsometry measurement by genetic algorithm

Zilong Peng, Zuoyi Li, Yu Hu, Liguo Tang, Xiaofei Yang

Proceedings Volume 4077, International Conference on Sensors and Control Techniques (ICSC 2000); (2000) https://doi.org/10.1117/12.385519
Event: International Conference on Sensors and Control Techniques (ICSC2000), 2000, Wuhan, China

Abstract

The principle of ellipsometry measurement and the foundation of the ellipsoidal equation were detailedly described, and the genetic algorithm was introduced to the calculation for refractivity and thickness of film, which ameliorates the astringency and the convergent speed. Emphatically discussed the designation of genetic operators according to the computing program flow chart.

Citation Download Citation

Zilong Peng, Zuoyi Li, Yu Hu, Liguo Tang, and Xiaofei Yang "Thickness and refractivity computation in ellipsometry measurement by genetic algorithm", Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); https://doi.org/10.1117/12.385519

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