High-precision measurements of the groove density of diffraction gratings

Daniele Cocco; Rudi Sergo; Giovanni Sostero; Marco Zangrando

doi:10.1117/12.406666

8 November 2000 High-precision measurements of the groove density of diffraction gratings

Daniele Cocco, Rudi Sergo, Giovanni Sostero, Marco Zangrando

Author Affiliations +

Proceedings Volume 4146, Soft X-Ray and EUV Imaging Systems; (2000) https://doi.org/10.1117/12.406666
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

The diffraction gratings are widely used to monochromatize and even focus the soft X-ray radiation produced by the high brilliance third generation synchrotron radiation sources. Nevertheless, the final performance of an instrument that uses a diffraction grating is sensitive to any figure error and to any undesired groove density variation along the surface of the grating itself. Therefore, typical requirements are 0.1 - 0.2 arcsec (even less) on the residual slope errors (after proper shape subtraction), while the groove density is required to be constant along the surface with a percentage error below 0.1%. Vice-versa, sometimes groove density variation is required along the surface to correct spherical aberrations or to change the focal properties of a grating. Since the gratings, in the soft X-ray region, work in grazing incidence mode, the ideal instrument to measure it is a mono-dimensional profilometer. At ELETTRA, the Italian third generation synchrotron radiation source, we have an in house modified version of the Long Trace Profiler.

Citation Download Citation

Daniele Cocco, Rudi Sergo, Giovanni Sostero, and Marco Zangrando "High-precision measurements of the groove density of diffraction gratings", Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); https://doi.org/10.1117/12.406666

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