Automatic mesh adaptivity for finite element simulation of multilayer MEMS

Jens Mueller; Jan G. Korvink

doi:10.1117/12.395615

11 August 2000 Automatic mesh adaptivity for finite element simulation of multilayer MEMS

Jens Mueller, Jan G. Korvink

Proceedings Volume 4175, Materials and Device Characterization in Micromachining III; (2000) https://doi.org/10.1117/12.395615
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

We have produced an automatic method with which to simulate the structural response of prestressed multi-layer plate and beam micro- structures accurately and reliably. The method relives the microsystem designer of the burden of finite element mesh design by performing local mesh refinement. A coarse mesh is iteratively refined according to an error that is computed directly from the finite element solution. The refinement strategy covers locally prestressed regions, plate composition inhomogeneities, and singular loads, yielding an optimized mesh and a highly accurate computed deformation.

Citation Download Citation

Jens Mueller and Jan G. Korvink "Automatic mesh adaptivity for finite element simulation of multilayer MEMS", Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); https://doi.org/10.1117/12.395615

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available