Nondestructive testing method of crystal surface defectiveness

Ekaterina V. Zhukova

doi:10.1117/12.402588

9 October 2000 Nondestructive testing method of crystal surface defectiveness

Ekaterina V. Zhukova

Proceedings Volume 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications; (2000) https://doi.org/10.1117/12.402588
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

Article is devoted to a not destroying method of analysis of crystals surface quality for a vacuum ultra-violet range. The registration of absorption spectra of color centers located in a thin near-surface layer of a crystal with the help of a method of attenuated total reflection spectroscopy allows to visualize defective structure layer formed after machining.

Citation Download Citation

Ekaterina V. Zhukova "Nondestructive testing method of crystal surface defectiveness", Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); https://doi.org/10.1117/12.402588

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