Influence of high-substrate-bias voltage on the characteristics of DLC coatings

Sheeja Divakaran; Beng Kang Tay; Shu Ping Lau

doi:10.1117/12.405384

24 October 2000 Influence of high-substrate-bias voltage on the characteristics of DLC coatings

Sheeja Divakaran, Beng Kang Tay, Shu Ping Lau

Proceedings Volume 4227, Advanced Microelectronic Processing Techniques; (2000) https://doi.org/10.1117/12.405384
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

Adhesive strength is one of the most important properties of any coating, and which can be improved by preparing an interface layer with increased ion energy i.e., by applying high substrate bias voltage. However, the films prepared under high substrate bias may have inferior qualities compared to the films that are prepared without any substrate bias. Hence, an investigation has been carried out to study the effect of high substrate bias voltages on the morphological, microstructure, mechanical and tribological properties of diamond-like carbon films. To identify the distinctive effect of the substrate bias, the films are prepared by a single step process with different substrate bias voltages.

Citation Download Citation

Sheeja Divakaran, Beng Kang Tay, and Shu Ping Lau "Influence of high-substrate-bias voltage on the characteristics of DLC coatings", Proc. SPIE 4227, Advanced Microelectronic Processing Techniques, (24 October 2000); https://doi.org/10.1117/12.405384

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