Evaluation of microbeam deflection using interferometry

S. H. Wang; Cho Jui Tay; Chenggen Quan; Huai Min Shang

doi:10.1117/12.429583

13 June 2001 Evaluation of microbeam deflection using interferometry

S. H. Wang, Cho Jui Tay, Chenggen Quan, Huai Min Shang

Author Affiliations +

Proceedings Volume 4317, Second International Conference on Experimental Mechanics; (2001) https://doi.org/10.1117/12.429583
Event: Second International Conference on Experimental Mechanics, 2000, Singapore, Singapore

Abstract

Current trends in the miniaturization of MEMS require the use of increasingly smaller components. MEMS has already offered challenging opportunities for improving test techniques. In this paper we have developed a technique for testing deflections of a micro-beam in an accelerometer under point-force load. The technique is based on light interferometry. A collimated monochomatic light is direct ed into an air-wedge consists of an optical flat and a micro- beam. A long distance microscope with a CCD camera is utilized to capture the interference fringe pattern which results from recombination of two-beam reflected from the optical flat and the micro-beam. The resulting fringe patterns are analyzed by the use of FFT and deflections of the micro-beam are obtained. The experimental results show that the proposed technique is relatively simple and accurate, and is a potential method for conducting measurement on micro-components.

Citation Download Citation

S. H. Wang, Cho Jui Tay, Chenggen Quan, and Huai Min Shang "Evaluation of microbeam deflection using interferometry", Proc. SPIE 4317, Second International Conference on Experimental Mechanics, (13 June 2001); https://doi.org/10.1117/12.429583

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