ELITE-3 active vibration isolation workstation

Eric H. Anderson; Bowie Houghton

doi:10.1117/12.429656

14 June 2001 ELITE-3 active vibration isolation workstation

Eric H. Anderson, Bowie Houghton

Proceedings Volume 4332, Smart Structures and Materials 2001: Industrial and Commercial Applications of Smart Structures Technologies; (2001) https://doi.org/10.1117/12.429656
Event: SPIE's 8th Annual International Symposium on Smart Structures and Materials, 2001, Newport Beach, CA, United States

Abstract

This paper describes the development and capabilities of ELITE-3, a product that incorporates piezoelectric actuators to provide ultrastable work surfaces for very high resolution wafer production, metrology, microscopy, and other applications. The electromechanical, electronic, and software/firmware parts of the ELITE-3 active workstation are described, with an emphasis on considerations relating to the piezoelectric transducers. Performance of the system and its relation to the smart materials is discussed. As the floor beneath a vibration-sensitive instrument supported by ELITE-3 moves, piezoelectrics are controlled to minimize the motion of the instrument. A digital signal processor (DSP) determines the appropriate signals to apply to the actuators. A PC-based interface allows reprogramming of control algorithms and resetting of other parameters within the firmware. The modular product allows incorporation of vibration isolator, actuator and sensor modules into original equipment manufacturer (OEM) products. Alternatively, a workstation can be integrated as an integrated standalone system. The paper describes the system architecture, overall approach to vibration isolation, and various system components, and summarizes motivations for key design approaches.

Citation Download Citation

Eric H. Anderson and Bowie Houghton "ELITE-3 active vibration isolation workstation", Proc. SPIE 4332, Smart Structures and Materials 2001: Industrial and Commercial Applications of Smart Structures Technologies, (14 June 2001); https://doi.org/10.1117/12.429656

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available