Linewidth asymmetry study to predict aberration in lithographic lenses

Jongwook Kye; Mircea V. Dusa; Harry J. Levinson

doi:10.1117/12.435664

14 September 2001 Linewidth asymmetry study to predict aberration in lithographic lenses

Jongwook Kye, Mircea V. Dusa, Harry J. Levinson

Proceedings Volume 4346, Optical Microlithography XIV; (2001) https://doi.org/10.1117/12.435664
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

In low-k1 optical lithography, aberration effects are more significant than ever before. Typically, aberrations are measured by phase measuring interferometry (PMI) when the lenses are fabricated, but this technique is not accessible for lithographers, nor does it include resist effects. Recent progress in resist-based evaluation techniques makes reliable Zernike coefficients available in many cases, but these approaches are still far away from practical application for lithographers, because it remains necessary to know which Zernike coefficients are important for controlling CD variations in each application. It is well known that coma aberration causes local CD variation, which is critical for device performance. In this study, we investigated in detail, characteristics of coma-induced linewidth asymmetry. From a practical point of view, the characterization methods proposed here could be used either for classification of lenses or to specify IC design rules.

Citation Download Citation

Jongwook Kye, Mircea V. Dusa, and Harry J. Levinson "Linewidth asymmetry study to predict aberration in lithographic lenses", Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); https://doi.org/10.1117/12.435664

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