Wireless surface acoustic wave and MEMS-based microsensors

Vijay K. Varadan; Vasundara V. Varadan

doi:10.1117/12.425310

30 April 2001 Wireless surface acoustic wave and MEMS-based microsensors

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425310
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

The integration of SAW (Surface Acoustic Wave), MEMS and required microelectronics and conformal antennas to realize programmable microsensors suitable for many engineering and biomedical applications will be presented in this talk. This unique combination of technologies results in novel conformal sensors that can be remotely sensed by a wireless communication system with the advantage of no power requirements at the sensor site (passive sensor). The required features in many of these applications are high precision, wide dynamic range and wide frequency range. MEMS-SAW based devices presented possess typical advantages of MEMS sensors including the additional benefits of robustness, excellent sensitivity, surface conformability and durability. After a brief overview of SAW sensors and MEMS, the paper is focused on the design and fabrication of MEMS devices for a few engineering applications such as accelerometer and gyroscopes for automobile, inertial navigation sensors and tire pressure sensor.

Citation Download Citation

Vijay K. Varadan and Vasundara V. Varadan "Wireless surface acoustic wave and MEMS-based microsensors", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425310

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available