Control of line-addressable micromirror phase arrays using electromechanical bistability

Harris J. Hall; Eric P. Magee; William D. Cowan

doi:10.1117/12.454705

1 February 2002 Control of line-addressable micromirror phase arrays using electromechanical bistability

Harris J. Hall, Eric P. Magee, William D. Cowan

Proceedings Volume 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III; (2002) https://doi.org/10.1117/12.454705
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

This research involves the design and implementation of a complete line-addressable control system for a 32 X 32 electrostatic piston-actuated micromirror array device. Line addressing reduces the number of control lines from N² to 2N making it possible to design larger arrays and arrays with smaller element sizes. The system utilizes the electromechanical bistability of individual elements to hold arbitrary bistable phase patterns, a technique previously used on tilt arrays. The control system applies pulse width modulated (PWM) signals to the rows and columns of the device to generate a static phase pattern across the array. Three modes of operation are considered and built into the system. The first is the traditional signal scheme which requires the array to be reset before a new pattern can be applied. The second is an original scheme that allows dynamic switching between bistable patterns. The third and final mode considered is an effective voltage ramp across the device by operating above mechanical cutoff. Device characterization and control system testing are conducted on samples from two different foundry processes. The test results showed that the control system was successfully integrated, however individual bistable control was not successfully demonstrated on the micromirror arrays tested. The inability to demonstrate bistable control is attributed to flaws in the device and variations in snap-down voltage with the application of PWM signals below mechanical cutoff. Methods to correct these flaws for a future redesigned line- addressable device are proposed.

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Harris J. Hall, Eric P. Magee, and William D. Cowan "Control of line-addressable micromirror phase arrays using electromechanical bistability", Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); https://doi.org/10.1117/12.454705

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KEYWORDS

Chemical elements

Control systems

Micromirrors

Bistability

Mirrors

Control systems design

Microelectromechanical systems

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