Analysis of inertia forces influence on operation voltage of electrostatic microrelays

Georgy I. Efremov; Nikolay Ivanovich Mukhurov

doi:10.1117/12.443033

1 October 2001 Analysis of inertia forces influence on operation voltage of electrostatic microrelays

Georgy I. Efremov, Nikolay Ivanovich Mukhurov

Proceedings Volume 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication; (2001) https://doi.org/10.1117/12.443033
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

An approach to calculate flat-parallel-type electrostatic microrelay operation voltage taking into account inertia forces is proposed. The versions to determine parameters influencing inertia masses acceleration are considered. Analysis of interacting factors is performed. Experimental microrelay calculation data and recommendations on inertia forces lowering are presented.

Citation Download Citation

Georgy I. Efremov and Nikolay Ivanovich Mukhurov "Analysis of inertia forces influence on operation voltage of electrostatic microrelays", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); https://doi.org/10.1117/12.443033

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