Mass sensitivity of layered shear-horizontal surface acoustic wave devices for sensing applications

Kourosh Kalantar-Zadeh; Adrian Trinchi; Wojtek Wlodarski; Anthony Holland; Kosmas Galatsis

doi:10.1117/12.449140

21 November 2001 Mass sensitivity of layered shear-horizontal surface acoustic wave devices for sensing applications

Kourosh Kalantar-Zadeh, Adrian Trinchi, Wojtek Wlodarski, Anthony Holland, Kosmas Galatsis

Proceedings Volume 4591, Electronics and Structures for MEMS II; (2001) https://doi.org/10.1117/12.449140
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Layered Surface Acoustic Wave (SAW) devices that allow the propagation of Love mode acoustic waves will be studied in this paper. In these devices, the substrate allows the propagation of Surface Skimming Bulks Waves (SSBWs). By depositing layers, that the speed of Shear Horizontal (SH) acoustic wave propagation is less than that of the substrate, the propagation mode transforms to Love mode. Love mode devices which will be studied in this paper, have SiO2 and ZnO acoustic guiding layers. As Love mode of propagation has no movement of particles component normal to the active sensor surface, they can be employed for the sensing applications in the liquid media.

Citation Download Citation

Kourosh Kalantar-Zadeh, Adrian Trinchi, Wojtek Wlodarski, Anthony Holland, and Kosmas Galatsis "Mass sensitivity of layered shear-horizontal surface acoustic wave devices for sensing applications", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); https://doi.org/10.1117/12.449140

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available