Forces balance of micromachined accelerometer

Yulie Wu; Xuezhong Wu; Shengyi Li

doi:10.1117/12.444721

15 October 2001 Forces balance of micromachined accelerometer

Yulie Wu, Xuezhong Wu, Shengyi Li

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444721
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

For capacitive micromahcined accelerometers, in order to measure external acceleration, forces balance is usually introduced in the device. According to the conditioning circuitry adopted, this paper identifies three kinds of forces balance in the micromahcined accelerometer, namely, elastic forces balance, electrostatic forces balance and combination forces balance. Their performances such as linearity and frequency response are analyzed respectively

Citation Download Citation

Yulie Wu, Xuezhong Wu, and Shengyi Li "Forces balance of micromachined accelerometer", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444721

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