Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers

Tian-Bing Xu; Zhong-Yang Cheng; Qi Ming Zhang

doi:10.1117/12.475043

11 July 2002 Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers

Tian-Bing Xu, Zhong-Yang Cheng, Qi Ming Zhang

Author Affiliations +

Proceedings Volume 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology; (2002) https://doi.org/10.1117/12.475043
Event: SPIE's 9th Annual International Symposium on Smart Structures and Materials, 2002, San Diego, California, United States

Abstract

We report on the performance of micromachined unimorph actuators (PMAT) based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymer. Because of the high electrostrictive strain and high elastic energy density of the active polymer, the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio. In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range. The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.

Citation Download Citation

Tian-Bing Xu, Zhong-Yang Cheng, and Qi Ming Zhang "Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers", Proc. SPIE 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, (11 July 2002); https://doi.org/10.1117/12.475043

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