MEMS-based sensor arrays for military applications

Paul B. Ruffin

doi:10.1117/12.475022

11 July 2002 MEMS-based sensor arrays for military applications

Paul B. Ruffin

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Proceedings Volume 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology; (2002) https://doi.org/10.1117/12.475022
Event: SPIE's 9th Annual International Symposium on Smart Structures and Materials, 2002, San Diego, California, United States

Abstract

Scientists and engineers at the Army Aviation Missile Command's (AMCOM) Research, Development and Engineering Center (RDEC) are cooperatively working with the Defense Advanced Research Projects Agency (DARPA), other Army agencies, and industry to provide technical solutions for the Army's transformation efforts into the 21st Century force. Advanced technologies are being exposed to achieve the performance and cost goals dictated by the emerging missions of the Transformed Army. It is well established that MEMS technology offers the potential solution to cost, size, and weight issues for the soldier, missile, gun, ground vehicles, and aircraft applications. MEMS sensor arrays are currently being investigated to meet system performance requirements and provide more robust mission capability. A Science and Technology Objective, Research and Development Project is underway at AMCOM/RDEC to develop controlled MEMS sensor arrays to provide for full military dynamic performance ranges using miniature sensor system. MEMS-based angular rate sensors are enhanced with vibration feedback form MEMS accelerometers for output signal stabilization in high-vibration environments. Multi-range MEMS-based accelerometers, cooperatively developed by Government and industry, are being multiplexed to provide dynamic range expansion. An array of integrated accelerometers is expected to increase the dynamic range by an order of magnitude. Future projections suggest that MEMS sensor array technology will be applicable to a broad range of military applications, which include environmental sensor suites for structural health monitoring and forward reconnaissance and surveillance; and optical and radio frequency phased arrays for fast beam steering.

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Paul B. Ruffin "MEMS-based sensor arrays for military applications", Proc. SPIE 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, (11 July 2002); https://doi.org/10.1117/12.475022

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