Micro-optic fabrication using laser ablation process

Won-Seok Chang; Kyung-Ku Yoon; Jaegu Kim; Bosung Shin; Kyung-Hyun Whang

doi:10.1117/12.482060

13 September 2002 Micro-optic fabrication using laser ablation process

Won-Seok Chang, Kyung-Ku Yoon, Jaegu Kim, Bosung Shin, Kyung-Hyun Whang

Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482060
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States

Abstract

The feasibility of laser ablation in micro-machining of 3D structure of MEMS (Micro Electro Mechanical Systems) parts, specifically micro optics was studied in this paper. The micro-machining characteristics of polymer such as etching rate vs. energy fluence, number of pulse are investigated experimentally. The threshold energy density of polyurethane is about 30 mJ/cm² and ablated depth per pulse can be precisely controlled in the range of 0.1-0.8μm by the attenuation of energy fluence. By mask moving technique, the micro prism, cylindrical lens and inclined surface were fabricated. These 3D structures can be used as master in electro-plating mold. This paper also summarized the work on the development of a simulation program for modeling the process of machining quasi-three dimensional shapes with the excimer laser beam on a constant moving polymer. Relatively simple masks of rectangle, triangle and half circle shape are considered. The etching depth is calculated by considering the number of laser pulses and the wavelength of laser beam irradiated on the various specimen surface such as PMMA, polyurethane and PI. It was found that similar shapes as experimental results, mask shape was designed to gain-lens surface which we want. As another method to manufacture micro lens the mask is made circular type and rotated during laser beam illumination. Opened mask area and scanning speed determine the surface shape of lens. Precise control of various parameters is admitted to fabricate micro optics.

Citation Download Citation

Won-Seok Chang, Kyung-Ku Yoon, Jaegu Kim, Bosung Shin, and Kyung-Hyun Whang "Micro-optic fabrication using laser ablation process", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482060

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