Paper
15 November 2002 Silicon micromirrors and their prospective application in the Next-Generation Space Telescope
Ernest J. Garcia, Marc A. Polosky, Gerard E. Sleefe
Author Affiliations +
Abstract
This paper describes a potential application of silicon surface micromachined (SMM) mirrors to a space imaging application. We have developed micromirror arrays that can be individually addressed for potential use in a spectrometer planned for NASA's Next Generation Space Telescope (NGST), which will be launched later this decade. An array of micromirrors has been designed to replace a conventional fixed slit mask that is commonly used in spectrometer instruments. The fixed slit mask is used to select the desired portions of an incoming optical signal for analysis. These mirrors are designed to operate in two states, on and off, with the on position directing the signal into the instrument. Such an array of micromirrors can then be used as a "programmable" slit mask where portions of the incoming field of view can be selected in software.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ernest J. Garcia, Marc A. Polosky, and Gerard E. Sleefe "Silicon micromirrors and their prospective application in the Next-Generation Space Telescope", Proc. SPIE 4788, Photonic Devices and Algorithms for Computing IV, (15 November 2002); https://doi.org/10.1117/12.453829
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CITATIONS
Cited by 2 patents.
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KEYWORDS
Mirrors

Micromirrors

Silicon

Space telescopes

Spectroscopy

Chemical elements

Actuators

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