Paper
24 June 2002 Semiconductor nanowire array
Author Affiliations +
Abstract
A novel vapor-liquid-solid epitaxy (VLSE) process has been developed to synthesize high-density semiconductor nanowire arrays. The nanowires generally are single crystalline and have diameters of 10-200 nm and aspect ratios of 10-100. The areal density of the array can be readily approach 1010 cm-2. Results based on Si and ZnO nanowire systems are reported here.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peidong Yang "Semiconductor nanowire array", Proc. SPIE 4806, Complex Mediums III: Beyond Linear Isotropic Dielectrics, (24 June 2002); https://doi.org/10.1117/12.472986
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Nanowires

Silicon

Zinc oxide

Semiconductors

Gold

Sapphire

Epitaxy

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