Development of low-absorption AR coatings for CO2 laser by ion-assisted deposition

Hiromi Iwamoto; Keiji Ebata; Hirokuni Nanba

doi:10.1117/12.486526

19 February 2003 Development of low-absorption AR coatings for CO₂ laser by ion assisted deposition

Hiromi Iwamoto, Keiji Ebata, Hirokuni Nanba

Author Affiliations +

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486526
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

We have developed an anti-reflection (AR) coating technique designed for high power carbon dioxide (CO₂) lasers that has low absorption and high resistance to humidity. This was achieved by performing ion-assisted deposition (IAD) using a Xe ion beam to apply BaF₂ and ZnSe used as coating materials with extremely low bulk absorption coefficients. It was found that to achieve highly compact BaF₂ thin films with low absorption on polycrystalline ZnSe substrates, both a surface flatness treatment using Xe ion bombardment and an optimized IAD condition of relatively low ion energy up to 200 eV are required. The absorption of the new (BaF₂/ZnSe) AR coated ZnSe lens is 0.10 to 0.12%, approximately half that of conventional (ThF₄/ZnSe) AR coated lenses. The new lens has both excellent anti-aging performance and a high resistance to humidity.

Citation Download Citation

Hiromi Iwamoto, Keiji Ebata, and Hirokuni Nanba "Development of low-absorption AR coatings for CO₂ laser by ion assisted deposition", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486526

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