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A 3X3 array of hyperboloid quadrupole mass filters with a 3 mm pole length was fabricated using the LIGA (LIthographic Galvanoformung and Abformung) process. Electrical connectivity and spatial orientation are established by bonding the pole array to a low temperature co-fired ceramic (LTCC) substrate. A miniature scroll pump for vacuum pumping with a scroll height of 3 mm was also fabricated using the LIGA process. New LIGA fabrication steps (e.g. expose and developed freestanding PMMA, compression bonding of electroplating base and PMMA, low-stress electroplated films) have been developed to fabricate ultra thick PMMA molds with high aspect ratios (70:1) and high precision. Computational analysis was performed to estimate the miniature scroll pump performance characteristics.
Dean V. Wiberg,Nosang V. Myung,Beverley Eyre,Kirill Shcheglov,Otto J. Orient,Eric Moore, andPhilip Munz
"LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer", Proc. SPIE 4878, First Jet Propulsion Laboratory In Situ Instruments Workshop, (25 July 2003); https://doi.org/10.1117/12.520540
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Dean V. Wiberg, Nosang V. Myung, Beverley Eyre, Kirill Shcheglov, Otto J. Orient, Eric Moore, Philip Munz, "LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer," Proc. SPIE 4878, First Jet Propulsion Laboratory In Situ Instruments Workshop, (25 July 2003); https://doi.org/10.1117/12.520540