Improved design of piezoelectric microactuators for HDD

Gih Keong Lau; Hejun Du

doi:10.1117/12.469408

14 November 2002 Improved design of piezoelectric micro-actuators for HDD

Gih Keong Lau, Hejun Du

Proceedings Volume 4935, Smart Structures, Devices, and Systems; (2002) https://doi.org/10.1117/12.469408
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

This paper presents a design of piezoelectric micro-actuator with improved stroke sensitivity and adequate level of lateral resonant frequency for hard disk drive (HDD) application. The improved design employed active piezoelectric elements in push-pull configuration, and two flexural serpentines with inverse-T slits in between them. Instead of adopting conventional design of physical hinge, the two flexural serpentines allow flexural rotations of load beam about an artificial hinge at larger magnification factors. The present design also allows easy adjustment between stroke sensitivity and lateral resonant frequency, which are conflicting with each other, through placement of piezoelectric elements.

Citation Download Citation

Gih Keong Lau and Hejun Du "Improved design of piezoelectric micro-actuators for HDD", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); https://doi.org/10.1117/12.469408

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