Bilateral interdigital CPW phase shifter using BaSrTiO3 thin film on poly-Si/Si substrate for electronically steerable antenna architecture

Hargsoon Yoon; K. J. Vinoy; Jose K. Abraham; Vijay K. Varadan

doi:10.1117/12.497436

22 July 2003 Bilateral interdigital CPW phase shifter using BaSrTiO₃ thin film on poly-Si/Si substrate for electronically steerable antenna architecture

Hargsoon Yoon, K. J. Vinoy, Jose K. Abraham, Vijay K. Varadan

Author Affiliations +

Proceedings Volume 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2003) https://doi.org/10.1117/12.497436
Event: Smart Structures and Materials, 2003, San Diego, California, United States

Abstract

In this paper the design and development of a planar phase shifter on poly-Si/high resistivity silicon is presented. A new bilateral interdigital coplanar waveguide (BI-CPW) configuration has been developed to get higher effective dielectric constant than normal CPW having same dimensions. This design makes use of BaSrTiO₃ thin film effectively. A new process flow has been developed to enable full compatibility with emerging SiGe/Si technology. Another important feature of this design is the inclusion of a poly-Si layer for lowering operation voltage.

Citation Download Citation

Hargsoon Yoon, K. J. Vinoy, Jose K. Abraham, and Vijay K. Varadan "Bilateral interdigital CPW phase shifter using BaSrTiO₃ thin film on poly-Si/Si substrate for electronically steerable antenna architecture", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); https://doi.org/10.1117/12.497436

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